CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer via the complementary metal-oxide-semiconductor com...

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Bibliographic Details
Main Authors: Hu Ting, Zhong Qize, Li Nanxi, Dong Yuan, Xu Zhengji, Fu Yuan Hsing, Li Dongdong, Bliznetsov Vladimir, Zhou Yanyan, Lai Keng Heng, Lin Qunying, Zhu Shiyang, Singh Navab
Format: Article
Language:English
Published: De Gruyter 2020-02-01
Series:Nanophotonics
Subjects:
metasurface
glass wafer
metalens
Online Access:https://doi.org/10.1515/nanoph-2019-0470

Internet

https://doi.org/10.1515/nanoph-2019-0470

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