Effect of implantation of Sm+ ions into RF sputtered ZnO thin film
The effects of implantation of Samarium ions (Sm+), a rare earth ion (RE) on the properties of ZnO films grown on Si (001) substrate by RF sputtering system are presented. The structural properties of the virgin and Sm–implanted ZnO thin films were investigated by Atomic force microscopy, Rutherford...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5093586 |