Nano-indentation mechanical characterizations of solution processed inorganic metal oxide thin films and influence of grain size
Aluminum-doped zinc oxide thin films were prepared by solution synthesis where molarity concentrations and mixing ratios for oxide and dopant sources were changed while deposition and pre- and post-deposition annealing steps remained the same. Post-deposition high-temperature annealing is known to i...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2020-10-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0020213 |