A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production
In this paper, we present a novel thermoresistive gas flow sensor with a high-yield and low-cost volume production by using front-side microfabricated technology. To best improve the thermal resistance, a micro-air-trench between the heater and the thermistors was opened to minimize the heat loss fr...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-02-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/11/2/205 |
id |
doaj-e31b1bdebecd414e81468338f10618a7 |
---|---|
record_format |
Article |
spelling |
doaj-e31b1bdebecd414e81468338f10618a72020-11-25T00:15:38ZengMDPI AGMicromachines2072-666X2020-02-0111220510.3390/mi11020205mi11020205A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume ProductionDan Xue0Jiachou Wang1Xinxin Li2State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaIn this paper, we present a novel thermoresistive gas flow sensor with a high-yield and low-cost volume production by using front-side microfabricated technology. To best improve the thermal resistance, a micro-air-trench between the heater and the thermistors was opened to minimize the heat loss from the heater to the silicon substrate. Two types of gas flow sensors were designed with the optimal thermal-insulation configuration and fabricated by a single-wafer-based single-side process in (111) wafers, where the type A sensor has two thermistors while the type B sensor has four. Chip dimensions of both sensors are as small as 0.7 mm × 0.7 mm and the sensors achieve a short response time of 1.5 ms. Furthermore, without using any amplification, the normalized sensitivity of type A and type B sensors is 1.9 mV/(SLM)/mW and 3.9 mV/(SLM)/mW for nitrogen gas flow and the minimum detectable flow rate is estimated at about 0.53 and 0.26 standard cubic centimeter per minute (sccm), respectively.https://www.mdpi.com/2072-666X/11/2/205gas flow sensorsingle-side bulk micromachiningultrahigh sensitivity |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Dan Xue Jiachou Wang Xinxin Li |
spellingShingle |
Dan Xue Jiachou Wang Xinxin Li A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production Micromachines gas flow sensor single-side bulk micromachining ultrahigh sensitivity |
author_facet |
Dan Xue Jiachou Wang Xinxin Li |
author_sort |
Dan Xue |
title |
A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production |
title_short |
A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production |
title_full |
A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production |
title_fullStr |
A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production |
title_full_unstemmed |
A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production |
title_sort |
front-side microfabricated thermoresistive gas flow sensor for high-performance, low-cost and high-yield volume production |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2020-02-01 |
description |
In this paper, we present a novel thermoresistive gas flow sensor with a high-yield and low-cost volume production by using front-side microfabricated technology. To best improve the thermal resistance, a micro-air-trench between the heater and the thermistors was opened to minimize the heat loss from the heater to the silicon substrate. Two types of gas flow sensors were designed with the optimal thermal-insulation configuration and fabricated by a single-wafer-based single-side process in (111) wafers, where the type A sensor has two thermistors while the type B sensor has four. Chip dimensions of both sensors are as small as 0.7 mm × 0.7 mm and the sensors achieve a short response time of 1.5 ms. Furthermore, without using any amplification, the normalized sensitivity of type A and type B sensors is 1.9 mV/(SLM)/mW and 3.9 mV/(SLM)/mW for nitrogen gas flow and the minimum detectable flow rate is estimated at about 0.53 and 0.26 standard cubic centimeter per minute (sccm), respectively. |
topic |
gas flow sensor single-side bulk micromachining ultrahigh sensitivity |
url |
https://www.mdpi.com/2072-666X/11/2/205 |
work_keys_str_mv |
AT danxue afrontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction AT jiachouwang afrontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction AT xinxinli afrontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction AT danxue frontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction AT jiachouwang frontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction AT xinxinli frontsidemicrofabricatedthermoresistivegasflowsensorforhighperformancelowcostandhighyieldvolumeproduction |
_version_ |
1725385750277521408 |