A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

A digital mode-matching control system based on feedback calibration, where two pilot tones are applied to actuate the sense mode by the robust feedback controller, is presented for a MEMS gyroscope in this paper. A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tunin...

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Bibliographic Details
Main Authors:	Bo Yang, Lei Wu, Chengfu Lu, Gang Wang
Format:	Article
Language:	English
Published:	Hindawi Limited 2019-01-01
Series:	Journal of Sensors
Online Access:	http://dx.doi.org/10.1155/2019/9894367

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