A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope
A digital mode-matching control system based on feedback calibration, where two pilot tones are applied to actuate the sense mode by the robust feedback controller, is presented for a MEMS gyroscope in this paper. A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tunin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2019-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2019/9894367 |