Radiation enhanced oxidation of proton-irradiated copper thin-films: Towards a new concept of ultra-high radiation dosimetry
The effects of extreme radiation levels on the electrical resistivity of metal thin films made of copper were studied by means of electrical measurements and post irradiation imaging. Different 3x3 mm2 chips were produced by depositing 500 nm of meander shaped copper on top of a silicon substrate. A...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-08-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5096606 |