Research progress on SiCN ceramic prepared at low temperature by chemical vapor deposition

Research progress on SiCN ceramic prepared at low temperature by chemical vapor deposition

Chemical vapor deposition (CVD) is a new technology for preparing inorganic materials which possess some advantages, such as lower preparation temperature, uniform and compact microstructure, and near-size molding, so it is one of the common methods to prepare functional ceramics. In the paper, seve...

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Bibliographic Details
Main Authors: MU Yangyang, TU Jianyong, XUE Jimei, YE Fang, CHENG Laifei
Format: Article
Language:zho
Published: Journal of Aeronautical Materials 2019-06-01
Series:Journal of Aeronautical Materials
Subjects:
CVD method
SiCN ceramics
microwave absorber
absorbing properties
Online Access:http://jam.biam.ac.cn/CN/Y2019/V39/I3/1

Internet

http://jam.biam.ac.cn/CN/Y2019/V39/I3/1

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