Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter
We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, wh...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7762076/ |