Investigations into packaging technology for membrane-based thermal flow sensors

A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown, which is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the sur...

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Main Authors: G. Dumstorff, E. Brauns, W. Lang
Format: Article
Language:English
Published: Copernicus Publications 2015-02-01
Series:Journal of Sensors and Sensor Systems
Online Access:http://www.j-sens-sens-syst.net/4/45/2015/jsss-4-45-2015.pdf
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spelling doaj-e00b58fbfa104fb1ad34ea2e6a11a14b2020-11-24T23:24:29ZengCopernicus PublicationsJournal of Sensors and Sensor Systems2194-87712194-878X2015-02-0141455210.5194/jsss-4-45-2015Investigations into packaging technology for membrane-based thermal flow sensorsG. Dumstorff0E. Brauns1W. Lang2Institute of Microsensors, -actuators, and -systems (IMSAS), Microsystems Center Bremen, University of Bremen, Bremen, GermanyInstitute of Microsensors, -actuators, and -systems (IMSAS), Microsystems Center Bremen, University of Bremen, Bremen, GermanyInstitute of Microsensors, -actuators, and -systems (IMSAS), Microsystems Center Bremen, University of Bremen, Bremen, GermanyA new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown, which is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. In addition, the experimental results are discussed. If a membrane-based thermal flow sensor is not mounted flush with the surface, vortices can occur (depending on velocity and fluid properties) or the reduction in the channel cross section plus a decrease in sensitivity have to be taken into account.http://www.j-sens-sens-syst.net/4/45/2015/jsss-4-45-2015.pdf
collection DOAJ
language English
format Article
sources DOAJ
author G. Dumstorff
E. Brauns
W. Lang
spellingShingle G. Dumstorff
E. Brauns
W. Lang
Investigations into packaging technology for membrane-based thermal flow sensors
Journal of Sensors and Sensor Systems
author_facet G. Dumstorff
E. Brauns
W. Lang
author_sort G. Dumstorff
title Investigations into packaging technology for membrane-based thermal flow sensors
title_short Investigations into packaging technology for membrane-based thermal flow sensors
title_full Investigations into packaging technology for membrane-based thermal flow sensors
title_fullStr Investigations into packaging technology for membrane-based thermal flow sensors
title_full_unstemmed Investigations into packaging technology for membrane-based thermal flow sensors
title_sort investigations into packaging technology for membrane-based thermal flow sensors
publisher Copernicus Publications
series Journal of Sensors and Sensor Systems
issn 2194-8771
2194-878X
publishDate 2015-02-01
description A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown, which is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. In addition, the experimental results are discussed. If a membrane-based thermal flow sensor is not mounted flush with the surface, vortices can occur (depending on velocity and fluid properties) or the reduction in the channel cross section plus a decrease in sensitivity have to be taken into account.
url http://www.j-sens-sens-syst.net/4/45/2015/jsss-4-45-2015.pdf
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AT wlang investigationsintopackagingtechnologyformembranebasedthermalflowsensors
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