The Effect of Deposition Parameters on the Structure and Mechanical Properties of Chromium Oxide Coatings Deposited by Reactive Magnetron Sputtering

The Effect of Deposition Parameters on the Structure and Mechanical Properties of Chromium Oxide Coatings Deposited by Reactive Magnetron Sputtering

Appropriate conditions for depositing hard Cr2O3 coatings by reactive sputtering techniques have yet to be defined. To fill this gap, the effect of principal deposition parameters, including deposition pressure, temperature, Cr-target voltage, and Ar/O2 ratio, on both the structure and mechanical pr...

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Bibliographic Details
Main Authors: Masoud Mohammadtaheri, Qiaoqin Yang, Yuanshi Li, Jesus Corona-Gomez
Format: Article
Language:English
Published: MDPI AG 2018-03-01
Series:Coatings
Subjects:
chromium oxide
coatings
reactive magnetron sputtering
hardness
structure
Online Access:http://www.mdpi.com/2079-6412/8/3/111

Internet

http://www.mdpi.com/2079-6412/8/3/111

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