Spectromicroscopic Studies of Porous Silicon Oxide on Silicon Using Synchrotron Radiation
This work is dedicated to microscopic synchrotron studies of the morphology, atomic, and electronic structure of an array of submicron-sized pores in a SiO2 layer on silicon formed with the use of ion-track technology in combination with chemical etching after irradiation. The research method was ph...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2020-03-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: | |
| Online Access: | https://journals.vsu.ru/kcmf/article/view/2532 |