Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of 𝑄 Factors and Flexural Resonance Frequencies for Microcantilevers
The qualitative agreement between experimental measurements of the 𝑄 factors and flexural resonance frequencies in air of microcantilevers and calculations based on the compressible fluid model of Van Eysden and Sader (2009) is presented. The 𝑄 factors and resonance frequencies observed on two sets...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2012-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2012/258381 |