Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Abstract To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range wh...

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Bibliographic Details
Main Authors: Ying Song, Bayanheshig, Shuo Li, Shan Jiang, Wei Wang
Format: Article
Language:English
Published: SpringerOpen 2019-03-01
Series:Photonic Sensors
Subjects:
Piecewise linear weighted iterative algorithm
beam alignment
scanning beam interference lithography (SBIL)
overshoot suppression
convergence speed
Online Access:http://link.springer.com/article/10.1007/s13320-019-0537-x

Internet

http://link.springer.com/article/10.1007/s13320-019-0537-x

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