MEMS development focusing on collaboration using common facilities: a retrospective view and future directions
Abstract I have been developing MEMS (microelectromechanical systems) technology and supporting the industry through collaboration. A facility was built in house on a 20 mm square wafer for use in prototyping MEMS and ICs (integrated circuits). The constructed MEMS devices include commercialized int...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2021-08-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00290-x |