Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering

Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering

In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H2 sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H2 sintering exhibited a high sensitivity than tha...

Full description

Bibliographic Details
Main Authors: Li-Chen Yen, Ming-Tsyr Tang, Fang-Yu Chang, Tung-Ming Pan, Tien-Sheng Chao, Chiang-Hsuan Lee
Format: Article
Language:English
Published: MDPI AG 2014-02-01
Series:Sensors
Subjects:
low-temperature polycrystalline-silicon (poly-Si)
thin-film transistors (TFTs)
H2 sintering
pH sensitivity
Online Access:http://www.mdpi.com/1424-8220/14/3/3825

Internet

http://www.mdpi.com/1424-8220/14/3/3825

Similar Items