Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined...

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Bibliographic Details
Main Authors: Holá Miroslava, Hrabina Jan, Sarbort Martin, Oulehla Jindrich, Cíp Ondrej, Lazar Josef
Format: Article
Language:English
Published: Sciendo 2015-10-01
Series:Measurement Science Review
Subjects:
nanometrology
interferometry
refractive index of air
Online Access:https://doi.org/10.1515/msr-2015-0036

Internet

https://doi.org/10.1515/msr-2015-0036

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