Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

Bibliographic Details
Main Authors:	Lobaev M.A., Gorbachev A.M., Vikharev A.L., Radishev D.B., Isaev V.A., Bogdanov S.A., Yunin P.A., Drozdov M.N., Butler J.E.
Format:	Article
Language:	English
Published:	EDP Sciences 2017-01-01
Series:	EPJ Web of Conferences
Online Access:	https://doi.org/10.1051/epjconf/201714902014

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spelling	doaj-db957bdeeb064978a8ce709d09cecaa92021-08-02T04:14:45ZengEDP SciencesEPJ Web of Conferences2100-014X2017-01-011490201410.1051/epjconf/201714902014epjconf_smp2017_02014Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angleLobaev M.A.0Gorbachev A.M.1Vikharev A.L.2Radishev D.B.3Isaev V.A.4Bogdanov S.A.5Yunin P.A.6Drozdov M.N.7Butler J.E.8Institute of Applied Physics of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of SciencesInstitute for Physics of Microstructures of the Russian Academy of SciencesInstitute for Physics of Microstructures of the Russian Academy of SciencesInstitute of Applied Physics of the Russian Academy of Scienceshttps://doi.org/10.1051/epjconf/201714902014
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Lobaev M.A. Gorbachev A.M. Vikharev A.L. Radishev D.B. Isaev V.A. Bogdanov S.A. Yunin P.A. Drozdov M.N. Butler J.E.
spellingShingle	Lobaev M.A. Gorbachev A.M. Vikharev A.L. Radishev D.B. Isaev V.A. Bogdanov S.A. Yunin P.A. Drozdov M.N. Butler J.E. Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle EPJ Web of Conferences
author_facet	Lobaev M.A. Gorbachev A.M. Vikharev A.L. Radishev D.B. Isaev V.A. Bogdanov S.A. Yunin P.A. Drozdov M.N. Butler J.E.
author_sort	Lobaev M.A.
title	Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle
title_short	Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle
title_full	Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle
title_fullStr	Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle
title_full_unstemmed	Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle
title_sort	dependence of boron incorporation in delta layers on cvd diamond growth process and misorientation angle
publisher	EDP Sciences
series	EPJ Web of Conferences
issn	2100-014X
publishDate	2017-01-01
url	https://doi.org/10.1051/epjconf/201714902014
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Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

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