Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

Bibliographic Details
Main Authors: Lobaev M.A., Gorbachev A.M., Vikharev A.L., Radishev D.B., Isaev V.A., Bogdanov S.A., Yunin P.A., Drozdov M.N., Butler J.E.
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:EPJ Web of Conferences
Online Access:https://doi.org/10.1051/epjconf/201714902014

Internet

https://doi.org/10.1051/epjconf/201714902014

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