Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies
Recent discussions concerning the continuation of Moore's law have focused on announcements by several major corporations to transition from traditional 2D planar to new 3D multi-gate field effect transistor devices. However, the growth and progression of the semiconductor microelectronics indu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2013-10-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4822437 |