A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities

A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities

In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated...

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Bibliographic Details
Main Authors: Estibaliz Asua, Victor Etxebarria, Alfredo García-Arribas, Jorge Feutchwanger, Joaquín Portilla, Julio Lucas
Format: Article
Language:English
Published: MDPI AG 2014-05-01
Series:Sensors
Subjects:
positioning sensors
resonant cavities
precision metrology
Online Access:http://www.mdpi.com/1424-8220/14/6/9615

Internet

http://www.mdpi.com/1424-8220/14/6/9615

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