Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system
<p>This article presents a new metrological atomic force microscope (MAFM) head with a new beam alignment and a combined one-beam detection of the cantilever deflection. An interferometric measurement system is used for the determination of the position of the cantilever, while a quadrant phot...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2021-07-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/10/171/2021/jsss-10-171-2021.pdf |