2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride

A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm² chip footprint. After an initial...

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Bibliographic Details
Main Authors: Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Sensors
Subjects:
2D
AlN
aluminum nitride
angle sensor
micromirror
microscanner
Online Access:https://www.mdpi.com/1424-8220/20/22/6599

Internet

https://www.mdpi.com/1424-8220/20/22/6599

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