A novel ZnO piezoelectric microcantilever energy scavenger: Fabrication and characterization
This novel piezoelectric zinc oxide (ZnO) thin film microcantilever was fabricated by micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) was performed by tetramethyl ammonium hydroxide (TMAH). The transverse piezoelectric coefficient d31 of the ZnO film, obt...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2016-07-01
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| Series: | Sensing and Bio-Sensing Research |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S221418041630054X |