Fabrication and characterization of Si1−xGex nanocrystals in as-grown and annealed structures: a comparative study

Fabrication and characterization of Si1−xGex nanocrystals in as-grown and annealed structures: a comparative study

Multilayer structures comprising of SiO2/SiGe/SiO2 and containing SiGe nanoparticles were obtained by depositing SiO2 layers using reactive direct current magnetron sputtering (dcMS), whereas, Si and Ge were co-sputtered using dcMS and high-power impulse magnetron sputtering (HiPIMS). The as-grown s...

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Bibliographic Details
Main Authors: Muhammad Taha Sultan, Adrian Valentin Maraloiu, Ionel Stavarache, Jón Tómas Gudmundsson, Andrei Manolescu, Valentin Serban Teodorescu, Magdalena Lidia Ciurea, Halldór Gudfinnur Svavarsson
Format: Article
Language:English
Published: Beilstein-Institut 2019-09-01
Series:Beilstein Journal of Nanotechnology
Subjects:
grazing incidence xrd (gixrd)
high-power impulse magnetron sputtering (hipims)
hrtem
magnetron sputtering
photocurrent spectra
sige nanocrystals in sio2/sige/sio2 multilayers
stem-haadf
tem
Online Access:https://doi.org/10.3762/bjnano.10.182

Internet

https://doi.org/10.3762/bjnano.10.182

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