Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility
Objectives: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. Methods: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2011-03-01
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| Series: | Safety and Health at Work |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2093791111210060 |