On the Design of a Diaphragm Valve for Aerostatic Bearings
Because of their almost zero friction, cleanness and long life, aerostatic bearings are commonly used in many applications where high precision of positioning is required, e.g. machine tools, measuring machines, semiconductor manufacturing and power board testing. However, air bearings suffer from l...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
|
| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2020/57/e3sconf_ati2020_07006.pdf |