Thick layers liquid-phase epitaxy method
On the basis of the authors' model of mass transfer, a new method for thick layers epitaxy has been developed. The method provides for the growth of different parts of the layers in two-layer systems obtained from the solution-melt and allows to control the thickness of substrate submelting and...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Politehperiodika
2013-05-01
|
Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
Subjects: | |
Online Access: | http://www.tkea.com.ua/tkea/2013/2-3_2013/pdf/09.zip |