Nonstoichiometry in TiO2−y Studied by Ion Beam Methods and Photoelectron Spectroscopy
This paper treats a problem of nonstoichiometry in TiO2−y thin films deposited by reactive sputtering at controlled sputtering rates. Ion beam techniques, Rutherford backscattering (RBS), and nuclear reaction analysis (NRA) along with X-ray photoelectron spectroscopy have been applied to determine a...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2012-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/826873 |