A film bulk acoustic resonator pressure sensor based on lateral field excitation

A film bulk acoustic resonator pressure sensor based on lateral field excitation

A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain f...

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Main Authors: Shujing Su, Zihui Geng, Xiaoxin Ma, Qiulin Tan, Jijun Xiong
Format: Article
Language:English
Published: SAGE Publishing 2018-11-01
Series:International Journal of Distributed Sensor Networks
Online Access:https://doi.org/10.1177/1550147718814343
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spelling doaj-d728ef06e3df4964adefb50aca5003ac2020-11-25T03:32:21ZengSAGE PublishingInternational Journal of Distributed Sensor Networks1550-14772018-11-011410.1177/1550147718814343A film bulk acoustic resonator pressure sensor based on lateral field excitationShujing Su0Zihui Geng1Xiaoxin Ma2Qiulin Tan3Jijun Xiong4Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, ChinaSchool of Electrical Engineering and Information, Sichuan University, Chengdu, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, ChinaA high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor’s resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.https://doi.org/10.1177/1550147718814343
collection DOAJ
language English
format Article
sources DOAJ
author Shujing Su
Zihui Geng
Xiaoxin Ma
Qiulin Tan
Jijun Xiong
spellingShingle Shujing Su
Zihui Geng
Xiaoxin Ma
Qiulin Tan
Jijun Xiong
A film bulk acoustic resonator pressure sensor based on lateral field excitation
International Journal of Distributed Sensor Networks
author_facet Shujing Su
Zihui Geng
Xiaoxin Ma
Qiulin Tan
Jijun Xiong
author_sort Shujing Su
title A film bulk acoustic resonator pressure sensor based on lateral field excitation
title_short A film bulk acoustic resonator pressure sensor based on lateral field excitation
title_full A film bulk acoustic resonator pressure sensor based on lateral field excitation
title_fullStr A film bulk acoustic resonator pressure sensor based on lateral field excitation
title_full_unstemmed A film bulk acoustic resonator pressure sensor based on lateral field excitation
title_sort film bulk acoustic resonator pressure sensor based on lateral field excitation
publisher SAGE Publishing
series International Journal of Distributed Sensor Networks
issn 1550-1477
publishDate 2018-11-01
description A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor’s resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.
url https://doi.org/10.1177/1550147718814343
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AT qiulintan afilmbulkacousticresonatorpressuresensorbasedonlateralfieldexcitation
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