A film bulk acoustic resonator pressure sensor based on lateral field excitation
A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain f...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2018-11-01
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| Series: | International Journal of Distributed Sensor Networks |
| Online Access: | https://doi.org/10.1177/1550147718814343 |