Nanoindentation response analysis of TiN-Cu coating deposited by magnetron sputtering
To investigate the change of the mechanical properties of soft metals doped PVD (Physical Vapor Deposition) coatings after the migration of soft metal to the surface, TiN-Cu coating was deposited on Si (100) by magnetron sputtering. The microstructure and mechanical properties at room temperature an...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2018-02-01
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| Series: | Progress in Natural Science: Materials International |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S1002007117305385 |