Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology

Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology

Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs Yb: KGW lase...

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Bibliographic Details
Main Authors: Lukang Wang, You Zhao, Yulong Zhao, Yu Yang, Taobo Gong, Le Hao, Wei Ren
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
4H-SiC
pressure sensor
femtosecond laser
bulk micromachining
Online Access:https://www.mdpi.com/2072-666X/12/1/56

Internet

https://www.mdpi.com/2072-666X/12/1/56

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