The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors. Currently FEBID is, however, limited in reso...

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Bibliographic Details
Main Authors: Rachel M. Thorman, Ragesh Kumar T. P., D. Howard Fairbrother, Oddur Ingólfsson
Format: Article
Language:English
Published: Beilstein-Institut 2015-09-01
Series:Beilstein Journal of Nanotechnology
Subjects:
dipolar dissociation
dissociative electron attachment
dissociative ionization
focused electron beam induced deposition (FEBID)
low-energy electron-induced fragmentation
neutral dissociation
Online Access:https://doi.org/10.3762/bjnano.6.194

Internet

https://doi.org/10.3762/bjnano.6.194

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