Method of Selecting the Operation Parameters of Electric Spindle with Aerostatic Supports for Separation of Semiconductor Plates to Crystals. Part 1. Development of a Mathematical Model of Axial Oscillations of the Electric Spindle
The article presents the results of studies of the mechanism of the occurrence of axial vibrations in the mechanical system “electrospindle shaft with aerostatic bearings – cutting diamond disk – cuttable semiconductor wafer”. A mathematical model of the resulting axial vibrations of the electrospin...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Academy of Sciences of Belarus, State Scientific Institution “The Joint Institute of Mechanical Engineering"
2020-09-01
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| Series: | Механика машин, механизмов и материалов |
| Subjects: | |
| Online Access: | http://mmmm.by/en/readers-en/archive-room-en?layout=edit&id=1600 |