Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demo...

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Bibliographic Details
Main Authors: Shaowei He, Huimin Yang, Yunhui Jiang, Wenjun Deng, Weiming Zhu
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/10/8/505