Oxygen source-oriented control of atmospheric pressure chemical vapor deposition of VO2 for capacitive applications
Vanadium dioxides of different crystalline orientation planes have successfully been fabricated by chemical vapor deposition at atmospheric pressure using propanol, ethanol and O2 gas as oxygen sources. The thick a-axis textured monoclinic vanadium dioxide obtained through propanol presented the be...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
International Association of Physical Chemists (IAPC)
2016-06-01
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Series: | Journal of Electrochemical Science and Engineering |
Subjects: | |
Online Access: | http://pub.iapchem.org/ojs/index.php/JESE/article/view/278 |