Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles

In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of...

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Bibliographic Details
Main Authors: Luigi Piro, Leonardo Lamanna, Francesco Guido, Antonio Balena, Massimo Mariello, Francesco Rizzi, Massimo De Vittorio
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
SAW
PEN
Online Access:https://www.mdpi.com/2079-4991/11/6/1479