100 GHz Silicon-based micro-machined patch antenna and arrays

100 GHz Silicon-based micro-machined patch antenna and arrays

This study designs a micro-machined BCB-cavity patch antenna and two types of four-element micro-machined antenna arrays at 100 GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity...

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Bibliographic Details
Main Authors: Jingtian Liu, Shuming Chen, Ke Xiao, Xiaowen Chen
Format: Article
Language:English
Published: Wiley 2019-07-01
Series:The Journal of Engineering
Subjects:
microstrip antennas
antenna arrays
antenna radiation patterns
silicon
micromachining
antenna feeds
millimetre wave antennas
etching
micromachined BCB-cavity patch antenna
patches
Benzocyclobutene polymer material
silicon substrate
BCB material
four-element antenna arrays
single antenna
2.8 GHz impedance bandwidth
100 GHz Silicon-based micromachined patch antenna
frequency 100.0 GHz
frequency 2.8 GHz
Online Access:https://digital-library.theiet.org/content/journals/10.1049/joe.2019.0241

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https://digital-library.theiet.org/content/journals/10.1049/joe.2019.0241

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