An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low inserti...

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Bibliographic Details
Main Authors: Johannes Stegner, Sebastian Gropp, Dmitry Podoskin, Uwe Stehr, Martin Hoffmann, Matthias A. Hein
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Sensors
Subjects:
analytical models
local oscillators
MEMS resonators
piezoelectric effect
radiofrequency microelectromechanical systems
RLC circuits
temperature dependence
Online Access:http://www.mdpi.com/1424-8220/18/7/2159

Internet

http://www.mdpi.com/1424-8220/18/7/2159

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