DFM: “Design for Manufacturing” or “Design Friendly Manufacturing”

DFM: “Design for Manufacturing” or “Design Friendly Manufacturing”

As the IC manufacturing enter sub 20nm tech nodes, DFM become more and more important to make sure more stable yield and lower cost. However, by introducing newly designed hardware (1980i etc.) process chemical (NTD) and Control Algorithm (Focus APC) into the mature tech nodes such as 14nm/12nm, mor...

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Bibliographic Details
Main Authors: Wenzhan Zhou, Hung-Wen Chao, Yu Zhang
Format: Article
Language:English
Published: JommPublish 2020-03-01
Series:Journal of Microelectronic Manufacturing
Subjects:
design for manufacturing (dfm)
design friendly manufacturing
euv lithography
source mask optimization (smo)
design technology co-optimization (dtco)
process window
process variation
Online Access:http://www.jommpublish.org/p/46/

Internet

http://www.jommpublish.org/p/46/

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