Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including unif...

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Bibliographic Details
Main Authors: Hassen M. Ouakad, Nouha Alcheikh, Mohammad I. Younis
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
MEMS
shallow arch
resonators
response
sensitivity
tunability
Online Access:https://www.mdpi.com/2072-666X/12/8/930

Internet

https://www.mdpi.com/2072-666X/12/8/930

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