An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness

An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness

A novel integrated sensor for the simultaneous measurement of layer refractive index and thickness based on evanescent fields is proposed. The theoretical limits for the accuracy of the sensor were examined for the example of a <inline-formula><math xmlns="http://www.w3.org/1998/Math/M...

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Bibliographic Details
Main Authors: Matthias Jäger, Jürgen Bruns, Jessica Schneidewind, Cay Pinnow, Hassan Gargouri, Klaus Petermann
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Sensors
Subjects:
silicon photonics
silicon on insulator (SOI)
ring resonator
refractive index sensing
Online Access:https://www.mdpi.com/1424-8220/21/5/1628

Internet

https://www.mdpi.com/1424-8220/21/5/1628

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