Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing
Moore's Law represents the cumulative effort by many participants to advance the productivity of electronic systems over the last 40+ years, resulting in enormous strides in the capability and ubiquity of electronics. This paper identifies the innovation challenges the semiconductor industry mu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2013-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/6548056/ |