Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing

Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing

Moore's Law represents the cumulative effort by many participants to advance the productivity of electronic systems over the last 40+ years, resulting in enormous strides in the capability and ubiquity of electronics. This paper identifies the innovation challenges the semiconductor industry mu...

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Bibliographic Details
Main Authors: Klaus Schuegraf, Mathew C. Abraham, Adam Brand, Mehul Naik, Randhir Thakur
Format: Article
Language:English
Published: IEEE 2013-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Device scaling
semiconductor manufacturing
Online Access:https://ieeexplore.ieee.org/document/6548056/

Internet

https://ieeexplore.ieee.org/document/6548056/

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