High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics

High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics

Bibliographic Details
Main Authors:	Carl Scharrer, Yuegang Zhao
Format:	Article
Language:	English
Published:	SAGE Publishing 2006-02-01
Series:	Measurement + Control
Online Access:	https://doi.org/10.1177/002029400603900104

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