High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2006-02-01
|
| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/002029400603900104 |