High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics

High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics

Bibliographic Details
Main Authors: Carl Scharrer, Yuegang Zhao
Format: Article
Language:English
Published: SAGE Publishing 2006-02-01
Series:Measurement + Control
Online Access:https://doi.org/10.1177/002029400603900104
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spelling doaj-ceb14714740d4db79ab9ca9db4f1d4842020-11-25T03:44:05ZengSAGE PublishingMeasurement + Control0020-29402006-02-013910.1177/002029400603900104High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate DielectricsCarl Scharrer0Yuegang Zhao1 Principal Industry Consultant, Keithley Instruments, Inc Senior Applications Engineer, Keithley Instruments, Inchttps://doi.org/10.1177/002029400603900104
collection DOAJ
language English
format Article
sources DOAJ
author Carl Scharrer
Yuegang Zhao
spellingShingle Carl Scharrer
Yuegang Zhao
High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
Measurement + Control
author_facet Carl Scharrer
Yuegang Zhao
author_sort Carl Scharrer
title High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
title_short High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
title_full High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
title_fullStr High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
title_full_unstemmed High-Frequency Capacitance Measurements for Monitoring EOT of Thin Gate Dielectrics
title_sort high-frequency capacitance measurements for monitoring eot of thin gate dielectrics
publisher SAGE Publishing
series Measurement + Control
issn 0020-2940
publishDate 2006-02-01
url https://doi.org/10.1177/002029400603900104
work_keys_str_mv AT carlscharrer highfrequencycapacitancemeasurementsformonitoringeotofthingatedielectrics
AT yuegangzhao highfrequencycapacitancemeasurementsformonitoringeotofthingatedielectrics
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