Influence of thickness of SiO2 layer on the performance of SINW sensors
Abstract Silicon nanowire devices employed traditional MEMS technology has the advantages of low cost and easy to batch fabricated, which can be applied for high‐sensitivity biological and chemical species detection. In the preparation process, the device performance would be greatly influenced by t...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-01-01
|
| Series: | Micro & Nano Letters |
| Online Access: | https://doi.org/10.1049/mna2.12010 |