Optimum Combination and Effect Analysis of Piezoresistor Dimensions in Micro Piezoresistive Pressure Sensor Using Design of Experiments and ANOVA: a Taguchi Approach
Piezoresistive (PZR) pressure sensors have gained importance because of their robust construction, high sensitivity and good linearity. The conventional PZR pressure sensor consists of 4 piezoresistors placed on diaphragm and are connected in the form of Wheatstone bridge. These sensors convert stre...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2017-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2017/Vol_211/P_2917.pdf |